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Switching to tin droplets for laser-produced plasma increased EUV conversion because tin emits strongly around 13.5 nm—matching mirror reflectivity windows—so more usable EUV per laser energy is produced, though neutral atoms and debris then require careful management to avoid reabsorption.
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See all →Pre-shaping a tin droplet into a thin pancake with a weak pre-pulse increases EUV output and limits debris because the flattened, rarified target presents a larger vaporized surface for the main pulse, producing more plasma emission with fewer neutral atoms and particulates to reabsorb light.
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