The only machine enabling the next stage of chip miniaturization costs about $400 million.
The only machine enabling the next stage of chip miniaturization costs about $400 million.
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A single nanometer of tin debris on the collector mirror can take the mirror out of commission.
The Engineering Test Stand fired a 1,700-watt laser into xenon gas to produce 13.4-nanometer light.
High-NA projection optics shrink a chip pattern eight times vertically and four times horizontally.
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