Once EUV physics worked, the real battle became solving the vast engineering problems of reliable factory operation.
Once EUV physics worked, the real battle became solving the vast engineering problems of reliable factory operation.
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A single nanometer of tin debris on the collector mirror can take the mirror out of commission.
The only machine enabling the next stage of chip miniaturization costs about $400 million.
The Engineering Test Stand fired a 1,700-watt laser into xenon gas to produce 13.4-nanometer light.
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